Aperture Setting
Semantic issues
Aperture setting is either indicated by aperture size or aperture current which in turn indicate the aperture size
Term
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- label_en: Aperture Setting
- definition_en: A setting which indicates the aperture size. This can either be the aperture size itself or a current which is used to set the aperture size. A smaller aperture size leads to a larger depth of focus in SEM.
- sources: https://www.jeol.co.jp/en/applications/pdf/sm/sem_atoz_all.pdf
- contributors: https://orcid.org/0000-0002-1507-9327, https://orcid.org/0000-0003-2534-0063