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<?xml version="1.0"?>
<rdf:RDF xmlns:rdf="http://www.w3.org/1999/02/22-rdf-syntax-ns#"
         xmlns:xsd="http://www.w3.org/2001/XMLSchema#"
         xmlns:rdfs="http://www.w3.org/2000/01/rdf-schema#"
         xmlns:owl="http://www.w3.org/2002/07/owl#"
         xml:base="https://purls.helmholtz-metadaten.de/emg"
         xmlns="https://purls.helmholtz-metadaten.de/emg#"
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         xmlns:term="http://purl.org/dc/terms/"
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         xmlns:sche="https://schema.org/"
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         xmlns:core="http://www.w3.org/2004/02/skos/core#"
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         xmlns:obo="http://purl.obolibrary.org/obo/"
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         xmlns:oboI="http://www.geneontology.org/formats/oboInOwl#">

<owl:Ontology rdf:about="https://purls.helmholtz-metadaten.de/emg/">
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  <owl:versionIRI rdf:resource="https://purls.helmholtz-metadaten.de/emg/"/>
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  <term:creator rdf:resource="https://orcid.org/0000-0001-7564-7990"/>
  <term:creator rdf:resource="https://orcid.org/0000-0002-5149-603X"/>
  <term:creator rdf:resource="https://orcid.org/0000-0003-0575-2853"/>
  <rdfs:seeAlso rdf:resource="https://codebase.helmholtz.cloud/em_glossary/em_glossary_owl"/>
  <sche:funder rdf:resource="https://ror.org/0281dp749"/>
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  <sche:funder rdf:resource="https://ror.org/05qj6w324"/>
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  <term:description rdf:datatype="http://www.w3.org/2001/XMLSchema#string">The EM Glossary is a widespread community effort to harmonize terminology in the electron and ion microscopies. It is created in a not-for profit collaboration between academic and non-university research institutions including domain and metadata experts. It provides harmonized terminology for application level semantic artifacts to source from and align with.</term:description>
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  <term:license rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://creativecommons.org/licenses/by/4.0/</term:license>
  <term:title rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Electron Microscopy Glossary</term:title>
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  <owl:priorVersion rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://purls.helmholtz-metadaten.de/emg/</owl:priorVersion>
  <owl:versionInfo rdf:datatype="http://www.w3.org/2001/XMLSchema#string">v0</owl:versionInfo>
  <sche:citation rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Azocar Guzman, A., Brendike-Mannix, O., Hofmann, V. (2024), Electron Microscopy Glossary, https://purls.helmholtz-metadaten.de/emg/</sche:citation>
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  <sche:creativeWorkStatus rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Glossary Specification</sche:creativeWorkStatus>
  <sche:logo rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://codebase.helmholtz.cloud/em_glossary/em_glossary/-/raw/main/EMGlossary.png</sche:logo>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0001-5870-4658</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0001-6534-4195</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0001-8480-4775</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-0070-4337</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-1008-4530</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-1278-4928</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-1418-0984</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-1507-9327</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-2818-5890</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-3054-8734</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-4499-0355</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-5149-603X</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-6004-2304</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-6368-2067</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-7086-1901</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-7117-5196</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-8218-3116</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-9555-7455</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-9700-4803</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0003-0000-4784</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0003-0575-2853</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0003-0930-082X</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0003-1965-7996</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0003-2285-9329</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0003-2534-0063</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0003-4745-9735</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0009-0008-6410-7217</term:contributor>
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</owl:Ontology>

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<owl:AnnotationProperty rdf:about="http://purl.org/dc/terms/creator">
  <rdfs:subPropertyOf rdf:resource="http://purl.org/dc/terms/contributor"/>
  <rdfs:range rdf:resource="http://purl.org/dc/terms/Agent"/>
  <rdfs:comment xml:lang="en-us">Examples of a Creator include a person, an organization, or a service. Typically, the name of a Creator should be used to indicate the entity.</rdfs:comment>
  <rdfs:label xml:lang="en-us">Creator</rdfs:label>
  <core:definition xml:lang="en-us">An entity primarily responsible for making the resource.</core:definition>
</owl:AnnotationProperty>

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<owl:AnnotationProperty rdf:about="https://schema.org/funder"/>

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<owl:AnnotationProperty rdf:about="http://purl.obolibrary.org/obo/IAO_0000111"/>

<owl:AnnotationProperty rdf:about="http://purl.obolibrary.org/obo/IAO_0000112"/>

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<owl:AnnotationProperty rdf:about="http://purl.obolibrary.org/obo/IAO_0000114"/>

<owl:AnnotationProperty rdf:about="http://purl.obolibrary.org/obo/IAO_0000115">
  <obo:IAO_0000114 rdf:resource="http://purl.obolibrary.org/obo/IAO_0000122"/>
  <rdfs:isDefinedBy rdf:resource="http://purl.obolibrary.org/obo/iao.owl"/>
  <obo:IAO_0000115 xml:lang="en">The official definition, explaining the meaning of a class or property. Shall be Aristotelian, formalized and normalized. Can be augmented with colloquial definitions.</obo:IAO_0000115>
  <obo:IAO_0000116 xml:lang="en">2012-04-05: 
Barry Smith

The official OBI definition, explaining the meaning of a class or property: 'Shall be Aristotelian, formalized and normalized. Can be augmented with colloquial definitions'  is terrible.

Can you fix to something like:

A statement of necessary and sufficient conditions explaining the meaning of an expression referring to a class or property.

Alan Ruttenberg

Your proposed definition is a reasonable candidate, except that it is very common that necessary and sufficient conditions are not given. Mostly they are necessary, occasionally they are necessary and sufficient or just sufficient. Often they use terms that are not themselves defined and so they effectively can't be evaluated by those criteria. 

On the specifics of the proposed definition:

We don't have definitions of 'meaning' or 'expression' or 'property'. For 'reference' in the intended sense I think we use the term 'denotation'. For 'expression', I think we you mean symbol, or identifier. For 'meaning' it differs for class and property. For class we want documentation that let's the intended reader determine whether an entity is instance of the class, or not. For property we want documentation that let's the intended reader determine, given a pair of potential relata, whether the assertion that the relation holds is true. The 'intended reader' part suggests that we also specify who, we expect, would be able to understand the definition, and also generalizes over human and computer reader to include textual and logical definition. 

Personally, I am more comfortable weakening definition to documentation, with instructions as to what is desirable. 

We also have the outstanding issue of how to aim different definitions to different audiences. A clinical audience reading chebi wants a different sort of definition documentation/definition from a chemistry trained audience, and similarly there is a need for a definition that is adequate for an ontologist to work with.  </obo:IAO_0000116>
  <obo:IAO_0000117 xml:lang="en">PERSON:Daniel Schober</obo:IAO_0000117>
  <obo:IAO_0000119 xml:lang="en">GROUP:OBI:&lt;http://purl.obolibrary.org/obo/obi&gt;</obo:IAO_0000119>
  <rdfs:label xml:lang="en">definition</rdfs:label>
</owl:AnnotationProperty>

<owl:AnnotationProperty rdf:about="http://purl.obolibrary.org/obo/IAO_0000116"/>

<owl:AnnotationProperty rdf:about="http://purl.obolibrary.org/obo/IAO_0000117"/>

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<owl:AnnotationProperty rdf:about="http://purl.obolibrary.org/obo/IAO_0000119">
  <obo:IAO_0000114 rdf:resource="http://purl.obolibrary.org/obo/IAO_0000122"/>
  <obo:IAO_0000111 xml:lang="en">definition source</obo:IAO_0000111>
  <obo:IAO_0000115 xml:lang="en">Formal citation, e.g. identifier in external database to indicate / attribute source(s) for the definition. Free text indicate / attribute source(s) for the definition. EXAMPLE: Author Name, URI, MeSH Term C04, PUBMED ID, Wiki uri on 31.01.2007</obo:IAO_0000115>
  <obo:IAO_0000117 xml:lang="en">PERSON:Daniel Schober</obo:IAO_0000117>
  <obo:IAO_0000119 xml:lang="en">Discussion on obo-discuss mailing-list, see http://bit.ly/hgm99w</obo:IAO_0000119>
  <obo:IAO_0000119 xml:lang="en">GROUP:OBI:&lt;http://purl.obolibrary.org/obo/obi&gt;</obo:IAO_0000119>
  <rdfs:label xml:lang="en">definition source</rdfs:label>
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</owl:AnnotationProperty>

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<owl:AnnotationProperty rdf:about="http://purl.obolibrary.org/obo/IAO_0000233"/>
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<owl:AnnotationProperty rdf:about="http://purl.obolibrary.org/obo/OMO_0003000">
  <obo:IAO_0000233 rdf:resource="https://github.com/information-artifact-ontology/ontology-metadata/issues/122"/>
  <term:contributor rdf:resource="https://orcid.org/0000-0003-4423-4370"/>
  <rdfs:subPropertyOf rdf:resource="http://www.geneontology.org/formats/oboInOwl#SynonymTypeProperty"/>
  <obo:IAO_0000112 rdf:datatype="http://www.w3.org/2001/XMLSchema#string">CHEBI:26523 (reactive oxygen species) has an exact synonym (ROS), which is of type OMO:0003000 (abbreviation)</obo:IAO_0000112>
  <obo:IAO_0000115 rdf:datatype="http://www.w3.org/2001/XMLSchema#string">A synonym type for describing abbreviations or initalisms</obo:IAO_0000115>
  <term:created rdf:datatype="http://www.w3.org/2001/XMLSchema#date">2023-03-03</term:created>
  <rdfs:label rdf:datatype="http://www.w3.org/2001/XMLSchema#string">abbreviation</rdfs:label>
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</owl:AnnotationProperty>

<owl:AnnotationProperty rdf:about="http://purl.org/dc/terms/contributor">
  <rdfs:range rdf:resource="http://purl.org/dc/terms/Agent"/>
  <rdfs:comment xml:lang="en-us">Examples of a Contributor include a person, an organization, or a service. Typically, the name of a Contributor should be used to indicate the entity.</rdfs:comment>
  <rdfs:label xml:lang="en-us">Contributor</rdfs:label>
  <core:definition xml:lang="en-us">An entity responsible for making contributions to the resource.</core:definition>
</owl:AnnotationProperty>

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<owl:AnnotationProperty rdf:about="http://www.geneontology.org/formats/oboInOwl#SynonymTypeProperty"/>

<owl:AnnotationProperty rdf:about="http://purl.obolibrary.org/obo/OMO_0003012">
  <obo:IAO_0000233 rdf:resource="https://github.com/information-artifact-ontology/ontology-metadata/issues/135"/>
  <term:contributor rdf:resource="https://orcid.org/0000-0003-4423-4370"/>
  <rdfs:subPropertyOf rdf:resource="http://www.geneontology.org/formats/oboInOwl#SynonymTypeProperty"/>
  <obo:IAO_0000112 rdf:datatype="http://www.w3.org/2001/XMLSchema#string">NASA is an word acronym for the US National Aeronautics and Space Administration because the acronym is pronounced. FBI is an initialism (also known as alphabetism) for the US Federal Bureau of Investigation since the letters are pronounced one at a time. JPEG is an acronym for Joint Photographic Experts Group but does not count as a word acronym nor an initialism since it is mixed how it is pronounced.</obo:IAO_0000112>
  <obo:IAO_0000115 rdf:datatype="http://www.w3.org/2001/XMLSchema#string">A synonym type for describing abbreviations that are a part of the full name's words, such as initialisms or alphabetisms.</obo:IAO_0000115>
  <term:created rdf:datatype="http://www.w3.org/2001/XMLSchema#date">2023-11-01</term:created>
  <rdfs:label rdf:datatype="http://www.w3.org/2001/XMLSchema#string">acronym</rdfs:label>
</owl:AnnotationProperty>

<owl:AnnotationProperty rdf:about="http://purl.org/dc/terms/created"/>

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<owl:AnnotationProperty rdf:about="http://purl.org/dc/terms/description">
  <rdfs:comment xml:lang="en-us">Description may include but is not limited to: an abstract, a table of contents, a graphical representation, or a free-text account of the resource.</rdfs:comment>
  <rdfs:label xml:lang="en-us">Description</rdfs:label>
  <rdfs:label rdf:datatype="http://www.w3.org/2001/XMLSchema#string">description</rdfs:label>
  <core:definition xml:lang="en-us">An account of the resource.</core:definition>
</owl:AnnotationProperty>

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<owl:AnnotationProperty rdf:about="http://purl.org/dc/terms/issued">
  <rdfs:range rdf:resource="http://www.w3.org/2000/01/rdf-schema#Literal"/>
  <rdfs:label xml:lang="en-us">Date Issued</rdfs:label>
  <core:definition xml:lang="en-us">Date of formal issuance (e.g., publication) of the resource.</core:definition>
</owl:AnnotationProperty>

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<owl:AnnotationProperty rdf:about="http://purl.org/dc/terms/license">
  <rdfs:range rdf:resource="http://purl.org/dc/terms/LicenseDocument"/>
  <rdfs:label xml:lang="en-us">License</rdfs:label>
  <core:definition xml:lang="en-us">A legal document giving official permission to do something with the resource.</core:definition>
</owl:AnnotationProperty>

<owl:AnnotationProperty rdf:about="http://purl.org/dc/terms/title">
  <rdfs:label xml:lang="en-us">Title</rdfs:label>
  <rdfs:label rdf:datatype="http://www.w3.org/2001/XMLSchema#string">title</rdfs:label>
  <core:definition xml:lang="en-us">A name given to the resource.</core:definition>
  <core:note xml:lang="en-us">In current practice, this term is used primarily with literal values; however, there are important uses with non-literal values as well. As of December 2007, the DCMI Usage Board is leaving this range unspecified pending an investigation of options.</core:note>
</owl:AnnotationProperty>

<owl:AnnotationProperty rdf:about="http://www.geneontology.org/formats/oboInOwl#hasBroadSynonym">
  <obo:IAO_0000117 rdf:resource="http://orcid.org/0000-0001-5208-3432"/>
  <oboI:hasDefinition>
  </oboI:hasDefinition>
  <rdfs:subPropertyOf rdf:resource="http://www.geneontology.org/formats/oboInOwl#hasSynonym"/>
  <obo:IAO_0000115 rdf:datatype="http://www.w3.org/2001/XMLSchema#string">An alternative label for a class or property which has a more general meaning than the preferred name/primary label.</obo:IAO_0000115>
  <rdfs:label xml:lang="en">has broad synonym</rdfs:label>
  <rdfs:label rdf:datatype="http://www.w3.org/2001/XMLSchema#string">has_broad_synonym</rdfs:label>
  <rdfs:label xml:lang="en">has_broad_synonym</rdfs:label>
  <rdfs:seeAlso rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://github.com/information-artifact-ontology/ontology-metadata/issues/18</rdfs:seeAlso>
</owl:AnnotationProperty>

<owl:AnnotationProperty rdf:about="http://www.geneontology.org/formats/oboInOwl#hasDefinition"/>

<owl:AnnotationProperty rdf:about="http://www.geneontology.org/formats/oboInOwl#hasSynonym">
  <oboI:hasDefinition>
  </oboI:hasDefinition>
  <rdfs:comment rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Note that this should be a super-property of hasRelatedSynonym, hasExactSynonym etc; however, we cannot state this and remain in OWL-DL</rdfs:comment>
  <rdfs:label xml:lang="en">has_synonym</rdfs:label>
</owl:AnnotationProperty>

<owl:AnnotationProperty rdf:about="http://www.geneontology.org/formats/oboInOwl#hasExactSynonym">
  <obo:IAO_0000117 rdf:resource="http://orcid.org/0000-0001-5208-3432"/>
  <oboI:hasDefinition>
  </oboI:hasDefinition>
  <rdfs:subPropertyOf rdf:resource="http://www.geneontology.org/formats/oboInOwl#hasSynonym"/>
  <obo:IAO_0000115 rdf:datatype="http://www.w3.org/2001/XMLSchema#string">An alternative label for a class or property which has the exact same meaning than the preferred name/primary label.</obo:IAO_0000115>
  <rdfs:label xml:lang="en">has exact synonym</rdfs:label>
  <rdfs:label rdf:datatype="http://www.w3.org/2001/XMLSchema#string">has_exact_synonym</rdfs:label>
  <rdfs:label xml:lang="en">has_exact_synonym</rdfs:label>
  <rdfs:seeAlso rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://github.com/information-artifact-ontology/ontology-metadata/issues/20</rdfs:seeAlso>
</owl:AnnotationProperty>

<owl:AnnotationProperty rdf:about="http://www.geneontology.org/formats/oboInOwl#hasNarrowSynonym">
  <obo:IAO_0000117 rdf:resource="http://orcid.org/0000-0001-5208-3432"/>
  <oboI:hasDefinition>
  </oboI:hasDefinition>
  <rdfs:subPropertyOf rdf:resource="http://www.geneontology.org/formats/oboInOwl#hasSynonym"/>
  <obo:IAO_0000115 rdf:datatype="http://www.w3.org/2001/XMLSchema#string">An alternative label for a class or property which has a more specific meaning than the preferred name/primary label.</obo:IAO_0000115>
  <rdfs:label xml:lang="en">has narrow synonym</rdfs:label>
  <rdfs:label rdf:datatype="http://www.w3.org/2001/XMLSchema#string">has_narrow_synonym</rdfs:label>
  <rdfs:label xml:lang="en">has_narrow_synonym</rdfs:label>
  <rdfs:seeAlso rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://github.com/information-artifact-ontology/ontology-metadata/issues/19</rdfs:seeAlso>
</owl:AnnotationProperty>

<owl:AnnotationProperty rdf:about="http://www.geneontology.org/formats/oboInOwl#hasRelatedSynonym">
  <obo:IAO_0000117 rdf:resource="http://orcid.org/0000-0001-5208-3432"/>
  <oboI:hasDefinition>
  </oboI:hasDefinition>
  <rdfs:subPropertyOf rdf:resource="http://www.geneontology.org/formats/oboInOwl#hasSynonym"/>
  <obo:IAO_0000115 rdf:datatype="http://www.w3.org/2001/XMLSchema#string">An alternative label for a class or property that has been used synonymously with the primary term name, but the usage is not strictly correct.</obo:IAO_0000115>
  <rdfs:label xml:lang="en">has related synonym</rdfs:label>
  <rdfs:label rdf:datatype="http://www.w3.org/2001/XMLSchema#string">has_related_synonym</rdfs:label>
  <rdfs:label xml:lang="en">has_related_synonym</rdfs:label>
  <rdfs:seeAlso rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://github.com/information-artifact-ontology/ontology-metadata/issues/21</rdfs:seeAlso>
</owl:AnnotationProperty>

<owl:AnnotationProperty rdf:about="http://www.w3.org/2004/02/skos/core#definition"/>

<owl:AnnotationProperty rdf:about="http://www.w3.org/2004/02/skos/core#example">
  <rdfs:isDefinedBy rdf:resource="http://www.w3.org/2004/02/skos/core"/>
  <rdfs:subPropertyOf rdf:resource="http://www.w3.org/2004/02/skos/core#note"/>
  <rdfs:label xml:lang="en">example</rdfs:label>
  <core:definition xml:lang="en">An example of the use of a concept.</core:definition>
</owl:AnnotationProperty>

<owl:AnnotationProperty rdf:about="http://www.w3.org/2004/02/skos/core#note">
  <rdfs:isDefinedBy rdf:resource="http://www.w3.org/2004/02/skos/core"/>
  <rdfs:label xml:lang="en">note</rdfs:label>
  <core:definition xml:lang="en">A general note, for any purpose.</core:definition>
  <core:scopeNote xml:lang="en">This property may be used directly, or as a super-property for more specific note types.</core:scopeNote>
</owl:AnnotationProperty>

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<owl:AnnotationProperty rdf:about="http://www.w3.org/2004/02/skos/core#scopeNote">
  <rdfs:isDefinedBy rdf:resource="http://www.w3.org/2004/02/skos/core"/>
  <rdfs:subPropertyOf rdf:resource="http://www.w3.org/2004/02/skos/core#note"/>
  <rdfs:label xml:lang="en">scope note</rdfs:label>
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  <core:scopeNote rdf:datatype="http://www.w3.org/2001/XMLSchema#string">The frame time is typically determined by a weighted sum of dwell time, move times and potentially wait time. The weighting factors are determined by the specific scan pattern.</core:scopeNote>
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  <core:scopeNote rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Wait time can happen for multiple reasons. For example, the time period until a detector is ready (e.g. EDS detector is cooled down). The time period until the specimen has reached the desired state for a measurement (e.g. in-situ heating/cooling). The time period until the machine has reached the desired state (e.g. switching from high vacuum to low vacuum mode in a variable pressure SEM). Frame flyback time may also be considered a wait time.</core:scopeNote>
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</owl:Class>

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  <core:scopeNote rdf:datatype="http://www.w3.org/2001/XMLSchema#string">The term is commonly used in diffraction experiments to describe the non-diffracted/non-scattered part of the beam after the specimen.</core:scopeNote>
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  <obo:IAO_0000119 rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://www.iso.org/obp/ui/#iso:std:iso:15932:ed-1:v1:en</obo:IAO_0000119>
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</owl:Class>

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  <core:scopeNote rdf:datatype="http://www.w3.org/2001/XMLSchema#string">A Kikuchi pattern used for further analysis typically shows seemingly parallel lines or bands on the detector plane.</core:scopeNote>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0009-0008-6410-7217</term:contributor>
  <oboI:hasRelatedSynonym rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Electron backscatter diffraction pattern (EBSP)</oboI:hasRelatedSynonym>
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</owl:Class>

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<owl:Class rdf:about="https://purls.helmholtz-metadaten.de/emg/EMG_00000053">
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  <core:scopeNote rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Compared to EBSD, TKD has a higher spatial resolution.</core:scopeNote>
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  <core:scopeNote rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Sometimes TKD might be referred to as "Transmission EBSD" (t-EBSD). The authors of this glossary consider this however technically wrong and deprecate the use of this terminology.</core:scopeNote>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0003-1965-7996</term:contributor>
  <obo:IAO_0000115 rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Kikuchi diffraction during which electrons leave the electron-transparent sample at the side opposite to the incident beam.</obo:IAO_0000115>
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  <obo:IAO_0000115 rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Diffraction which is based on a propagating electron wave.</obo:IAO_0000115>
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  <rdfs:subClassOf rdf:resource="https://purls.helmholtz-metadaten.de/emg/EMG_00000043"/>
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  <core:scopeNote rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Here we decided to differentiate backscattering and forwardscattering purely based on the particle trajectory angle relative to the incident beam.</core:scopeNote>
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  <obo:IAO_0000119 rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Ludwig Reimer, Scanning Electron Microscopy - Physics of Image Formation and Microanalysis (ISBN 978-3-642-08372-3) - pages 57ff</obo:IAO_0000119>
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  <obo:IAO_0000115 rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Scattering which results in scattered electrons with an absolute scattering angle smaller than 90 degrees.</obo:IAO_0000115>
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  <obo:IAO_0000115 rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Moving time during which either the position or the  orientation of a detector is altered.
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-1278-4928</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-1418-0984</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-1507-9327</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-2818-5890</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-5149-603X</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-7086-1901</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-8218-3116</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-9555-7455</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0003-0000-4784</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0003-0575-2853</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0003-4745-9735</term:contributor>
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  <obo:IAO_0000119 rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://doi.org/10.1007/978-1-4939-6676-9</obo:IAO_0000119>
  <obo:IAO_0000119 rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://www.iso.org/obp/ui/#iso:std:iso:22493:ed-2:v1:en</obo:IAO_0000119>
  <obo:IAO_0000115 rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Time period during which the beam remains at one position.</obo:IAO_0000115>
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</owl:Class>

<owl:Class rdf:about="https://purls.helmholtz-metadaten.de/emg/EMG_00000042">
  <rdfs:subClassOf rdf:resource="http://www.w3.org/2002/07/owl#Thing"/>
  <core:scopeNote rdf:datatype="http://www.w3.org/2001/XMLSchema#string">The region of interest might be incoherent (i.e. random walk) or consist of a set of multiple geometric coherent parts.</core:scopeNote>
  <core:scopeNote rdf:datatype="http://www.w3.org/2001/XMLSchema#string">We recognise this definition breaks down for non-2D regions of interest. In the future we will consider defining superclass such as "volume of interest". At the moment the majority of regions of interest are 2D and this is why this is a priority term. This class could be a potential synonym to space time in EOSC ontology</core:scopeNote>
  <rdfs:label rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Region Of Interest</rdfs:label>
  <obo:OMO_0003012 rdf:datatype="http://www.w3.org/2001/XMLSchema#string">ROI</obo:OMO_0003012>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0001-6534-4195</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-0070-4337</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-1278-4928</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-5149-603X</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-6368-2067</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-7117-5196</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0003-0575-2853</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0003-2285-9329</term:contributor>
  <obo:IAO_0000115 rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Area which is (1) on the specimen and (2) to be sampled during an experiment.</obo:IAO_0000115>
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</owl:Class>

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<owl:Class rdf:about="https://purls.helmholtz-metadaten.de/emg/EMG_00000020">
  <rdfs:subClassOf rdf:resource="https://purls.helmholtz-metadaten.de/emg/EMG_00000013"/>
  <rdfs:label rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Electron Backscatter Diffraction Pattern</rdfs:label>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0001-6534-4195</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-1278-4928</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-5149-603X</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-7117-5196</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0003-0575-2853</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0003-1965-7996</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0009-0008-6410-7217</term:contributor>
  <oboI:hasRelatedSynonym rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Kikuchi pattern</oboI:hasRelatedSynonym>
  <obo:IAO_0000115 rdf:datatype="http://www.w3.org/2001/XMLSchema#string">A diffraction pattern which is generated by electron backscatter diffraction.</obo:IAO_0000115>
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</owl:Class>

<owl:Class rdf:about="https://purls.helmholtz-metadaten.de/emg/EMG_00000025">
  <rdfs:subClassOf rdf:resource="http://www.w3.org/2002/07/owl#Thing"/>
  <core:scopeNote rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Emission current is a device- and component-dependent numerical property that can be monitored over time to evaluate e.g. service life and wear of a source. It is not cross-vendor or cross-device comparable.</core:scopeNote>
  <rdfs:label rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Emission Current</rdfs:label>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0001-5870-4658</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0001-6534-4195</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0001-8480-4775</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-0070-4337</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-1008-4530</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-1278-4928</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-1507-9327</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-4499-0355</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-5149-603X</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-6004-2304</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-6368-2067</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-7117-5196</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0003-0000-4784</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0003-0575-2853</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0003-0930-082X</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0003-2285-9329</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0003-2534-0063</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0003-4745-9735</term:contributor>
  <obo:IAO_0000115 rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Electrical current which is released from the source.</obo:IAO_0000115>
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</owl:Class>

<owl:Class rdf:about="https://purls.helmholtz-metadaten.de/emg/EMG_00000045">
  <rdfs:subClassOf rdf:resource="http://www.w3.org/2002/07/owl#Thing"/>
  <core:scopeNote rdf:datatype="http://www.w3.org/2001/XMLSchema#string">The nature and the function of sources differ depending on application case and  instrument. There are two classes of emission sources, thermionic emitters (filament &amp; LaB6)  and field emitters.</core:scopeNote>
  <rdfs:label rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Source</rdfs:label>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0001-5870-4658</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0001-8480-4775</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-0070-4337</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0003-0575-2853</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0003-0930-082X</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0003-2285-9329</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0003-4745-9735</term:contributor>
  <obo:IAO_0000119 rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://cmrf.research.uiowa.edu/scanning-electron-microscopy</obo:IAO_0000119>
  <oboI:hasExactSynonym rdf:datatype="http://www.w3.org/2001/XMLSchema#string">emission source</oboI:hasExactSynonym>
  <obo:IAO_0000115 rdf:datatype="http://www.w3.org/2001/XMLSchema#string">A physical part of an electron or ion microscope from which the particles that form the beam are emitted.</obo:IAO_0000115>
  <core:example rdf:datatype="http://www.w3.org/2001/XMLSchema#string">LaB_6 crystal</core:example>
  <core:example rdf:datatype="http://www.w3.org/2001/XMLSchema#string">liquid metal Gallium</core:example>
  <core:example rdf:datatype="http://www.w3.org/2001/XMLSchema#string">tungsten crystal</core:example>
  <core:example rdf:datatype="http://www.w3.org/2001/XMLSchema#string">tungsten wire</core:example>
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</owl:Class>

<owl:Class rdf:about="https://purls.helmholtz-metadaten.de/emg/EMG_00000064">
  <rdfs:subClassOf rdf:resource="https://purls.helmholtz-metadaten.de/emg/EMG_00000022"/>
  <core:scopeNote rdf:datatype="http://www.w3.org/2001/XMLSchema#string">The here given definition is \"unpacked\" in order to keep brevity and precision. The specifics for e.g. \"Bragg's law\" are therefore defined elsewhere in the glossary and not part of the definition here.</core:scopeNote>
  <rdfs:label rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Bragg Diffraction</rdfs:label>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0001-6534-4195</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-1278-4928</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-7086-1901</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0009-0008-6410-7217</term:contributor>
  <obo:IAO_0000119 rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://physicsopenlab.org/2018/01/18/bragg-diffraction/</obo:IAO_0000119>
  <obo:IAO_0000115 rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Diffraction which follows Bragg's law.</obo:IAO_0000115>
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</owl:Class>

<owl:Class rdf:about="https://purls.helmholtz-metadaten.de/emg/EMG_00000009">
  <rdfs:subClassOf rdf:resource="https://purls.helmholtz-metadaten.de/emg/EMG_00000038"/>
  <core:scopeNote rdf:datatype="http://www.w3.org/2001/XMLSchema#string">This definition refers to partial waves.</core:scopeNote>
  <rdfs:label rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Coherent Beam</rdfs:label>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0001-6534-4195</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-1278-4928</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-5149-603X</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0003-0575-2853</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0003-2285-9329</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0009-0008-6410-7217</term:contributor>
  <obo:IAO_0000115 rdf:datatype="http://www.w3.org/2001/XMLSchema#string">A monochromatic beam which consists of waves that have a defined phase relationship.</obo:IAO_0000115>
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</owl:Class>

<owl:Class rdf:about="https://purls.helmholtz-metadaten.de/emg/EMG_00000008">
  <rdfs:subClassOf rdf:resource="http://www.w3.org/2002/07/owl#Thing"/>
  <core:scopeNote rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Camera length depends on the optical setup and it is ideally determined from calibration measurements using known samples, e.g., gold on carbon.</core:scopeNote>
  <core:scopeNote rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Historically the term camera length was used in TEM, however more recently there have been innovative applications in SEM, see publications provided under examples provided in this class.</core:scopeNote>
  <core:scopeNote rdf:datatype="http://www.w3.org/2001/XMLSchema#string">This definition applies to the experimental technique of Fraunhofer far field diffraction. In diffraction mode the quantity camera length is used to qualify the level of magnification of the diffraction pattern onto the detector. Note that the camera length may by altered by the addition of lenses in the beam transforming the physical quantity in a virtual one.</core:scopeNote>
  <rdfs:label rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Camera Length</rdfs:label>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0001-8480-4775</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-1008-4530</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-1507-9327</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-5149-603X</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-6368-2067</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-7086-1901</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-7117-5196</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-9700-4803</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0003-0575-2853</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0003-2285-9329</term:contributor>
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  <obo:IAO_0000119 rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://www.doi.org/10.1007/978-3-030-00069-1</obo:IAO_0000119>
  <obo:IAO_0000119 rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://www.em.tf.fau.de/2020/04/02/low-energy-electron-diffraction-lend-published-in-ultramicroscopy/</obo:IAO_0000119>
  <obo:IAO_0000119 rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://www.globalsino.com/EM/page3245.html</obo:IAO_0000119>
  <obo:IAO_0000119 rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://www.jeol.co.jp/en/words/emterms/search_result.html?keyword=camera%20length</obo:IAO_0000119>
  <oboI:hasExactSynonym rdf:datatype="http://www.w3.org/2001/XMLSchema#string">effective camera length</oboI:hasExactSynonym>
  <obo:IAO_0000115 rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Distance which is present between the specimen surface and the detector plane.</obo:IAO_0000115>
  <rdfs:seeAlso rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://doi.org/10.1016/j.ultramic.2020.112956</rdfs:seeAlso>
  <rdfs:seeAlso rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://doi.org/10.1017/S1431927619002988</rdfs:seeAlso>
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</owl:Class>

<owl:Class rdf:about="https://purls.helmholtz-metadaten.de/emg/EMG_00000051">
  <rdfs:subClassOf rdf:resource="https://purls.helmholtz-metadaten.de/emg/EMG_00000022"/>
  <core:scopeNote rdf:datatype="http://www.w3.org/2001/XMLSchema#string">In an experimental setup the diffraction described here will form a Kikuchi pattern which is measured to infer information about the crystal lattice of the sample.</core:scopeNote>
  <core:scopeNote rdf:datatype="http://www.w3.org/2001/XMLSchema#string">This definition makes use of the wave-particle dualism in the sense that we use both the term scattering and diffraction in one definition.</core:scopeNote>
  <rdfs:label rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Kikuchi Diffraction</rdfs:label>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0001-6534-4195</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-1278-4928</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-5149-603X</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-6368-2067</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-7117-5196</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0003-1965-7996</term:contributor>
  <obo:IAO_0000115 rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Electron diffraction during which, in a sequential order, electrons of the incident beam are inelastically scattered, form a point source inside the specimen, and leave the specimen through Bragg diffraction.</obo:IAO_0000115>
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</owl:Class>

<owl:Class rdf:about="https://purls.helmholtz-metadaten.de/emg/EMG_00000028">
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  <core:scopeNote rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Flyback time is commonly associated with rectangular scan patterns and often described in metadata from vendors as such. A typical geometrical primitive for rectangular scans are lines. Flyback time may be considered a specific instance of wait time, however some instruments might still be able to acquire data during flyback time which is why it is defined separately in this artefact.</core:scopeNote>
  <rdfs:label rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Flyback Time</rdfs:label>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-7086-1901</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0003-2285-9329</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0003-4745-9735</term:contributor>
  <obo:IAO_0000115 rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Time period during which the beam moves from the final position of one scan line to the starting position of the subsequent scan line.</obo:IAO_0000115>
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</owl:Class>

<owl:Class rdf:about="https://purls.helmholtz-metadaten.de/emg/EMG_00000035">
  <rdfs:subClassOf rdf:resource="https://purls.helmholtz-metadaten.de/emg/EMG_00000040"/>
  <core:scopeNote rdf:datatype="http://www.w3.org/2001/XMLSchema#string">You can only have an incident beam in the presence of a specimen. Incident in this sense is a verb used to describe the action of the beam. Typically the beam path of an incident beam intersects with the specimen.</core:scopeNote>
  <rdfs:label rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Incident Beam</rdfs:label>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-0070-4337</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-1278-4928</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-5149-603X</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-6368-2067</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-7117-5196</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0003-0575-2853</term:contributor>
  <oboI:hasBroadSynonym rdf:datatype="http://www.w3.org/2001/XMLSchema#string">primary beam</oboI:hasBroadSynonym>
  <obo:IAO_0000115 rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Primary beam before it interacts with the specimen.</obo:IAO_0000115>
  <rdfs:seeAlso rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://www.iso.org/obp/ui/#iso:std:iso:15932:ed-1:v1:en</rdfs:seeAlso>
  <rdfs:seeAlso rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://www.iso.org/obp/ui/#iso:std:iso:23833:ed-2:v1:en</rdfs:seeAlso>
</owl:Class>

<owl:Class rdf:about="https://purls.helmholtz-metadaten.de/emg/EMG_00000037">
  <rdfs:subClassOf rdf:resource="https://purls.helmholtz-metadaten.de/emg/EMG_00000005"/>
  <rdfs:label rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Ion Beam</rdfs:label>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0001-5870-4658</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0001-6534-4195</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-0070-4337</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-1008-4530</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-1278-4928</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-1507-9327</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-5149-603X</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-6004-2304</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-6368-2067</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0003-0575-2853</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0003-0930-082X</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0003-2285-9329</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0003-4745-9735</term:contributor>
  <obo:IAO_0000115 rdf:datatype="http://www.w3.org/2001/XMLSchema#string">A beam which consists of ions.</obo:IAO_0000115>
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</owl:Class>

<owl:Class rdf:about="https://purls.helmholtz-metadaten.de/emg/EMG_00000046">
  <rdfs:subClassOf rdf:resource="http://www.w3.org/2002/07/owl#Thing"/>
  <core:scopeNote rdf:datatype="http://www.w3.org/2001/XMLSchema#string">It should also be noted that one often probes special anomalies, such as specific locations of the parent material. Furthermore, if the properties of a specimen are assumed to be the same as they were at the time when a specimen was taken from the parental  material, they still might change over time. A specimen may not be reproducible in time, e.g. it may be taken from a flowing stream or a portion of blood, no separable sampling error exists since this error is unavoidably included with the corresponding error of the estimate of the property, function being studied. The term is used across fields, i.e. in clinical, biological, geological, and  materials science studies.</core:scopeNote>
  <core:scopeNote rdf:datatype="http://www.w3.org/2001/XMLSchema#string">The terms specimen and sample are used widely interchangeable in the community. In some cases a sample might be thought of as something which is statistically representative of the parent material/sample where it was taken from while a specimen is not. However, this statistical value is not an inherent property of the sample but of the feature that was characterized. Therefore, this the relevance of this distinction depends on the application case. During discussions a large majority of contributors favoured these terms to be implemented as synonyms in this glossary.</core:scopeNote>
  <rdfs:label rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Specimen</rdfs:label>
  <obo:OMO_0003012 rdf:datatype="http://www.w3.org/2001/XMLSchema#string">SPEC</obo:OMO_0003012>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0001-6534-4195</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-0070-4337</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-1008-4530</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-1278-4928</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-1418-0984</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-1507-9327</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-6004-2304</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-6368-2067</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-7086-1901</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-8218-3116</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0003-0930-082X</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0003-2285-9329</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0003-2534-0063</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0003-4745-9735</term:contributor>
  <obo:IAO_0000119 rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://biolincc.nhlbi.nih.gov/glossary/</obo:IAO_0000119>
  <obo:IAO_0000119 rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://doi.org/10.1351/pac199062061193</obo:IAO_0000119>
  <obo:IAO_0000119 rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://goldbook.iupac.org/terms/view/S05809</obo:IAO_0000119>
  <oboI:hasExactSynonym rdf:datatype="http://www.w3.org/2001/XMLSchema#string">sample</oboI:hasExactSynonym>
  <obo:IAO_0000115 rdf:datatype="http://www.w3.org/2001/XMLSchema#string">A physical entity which contains material intended to be investigated.</obo:IAO_0000115>
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</owl:Class>

<owl:Class rdf:about="https://purls.helmholtz-metadaten.de/emg/EMG_00000038">
  <rdfs:subClassOf rdf:resource="https://purls.helmholtz-metadaten.de/emg/EMG_00000005"/>
  <core:scopeNote rdf:datatype="http://www.w3.org/2001/XMLSchema#string">According to the wave particle dualism the here given definition translates also to a beam which consists of waves having the same wavelength. Note that in practice, absolute monochromaticity cannot  be achieved and consequently a small energy spread always persists.</core:scopeNote>
  <rdfs:label rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Monochromatic Beam</rdfs:label>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0001-6534-4195</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-6368-2067</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0003-0575-2853</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0003-2285-9329</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0009-0008-6410-7217</term:contributor>
  <obo:IAO_0000115 rdf:datatype="http://www.w3.org/2001/XMLSchema#string">A beam which consists of particles of the same energy.</obo:IAO_0000115>
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</owl:Class>

<owl:Class rdf:about="https://purls.helmholtz-metadaten.de/emg/EMG_00000014">
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  <rdfs:subClassOf rdf:resource="http://www.w3.org/2002/07/owl#Thing"/>
  <rdfs:label rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Disk Of Least Confusion</rdfs:label>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0001-6534-4195</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-1278-4928</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-5149-603X</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-7117-5196</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0003-2285-9329</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0009-0008-6410-7217</term:contributor>
  <obo:IAO_0000115 rdf:datatype="http://www.w3.org/2001/XMLSchema#string">A cross section of a beam at which the beam has the smallest spatial extent.</obo:IAO_0000115>
</owl:Class>

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  <core:scopeNote rdf:datatype="http://www.w3.org/2001/XMLSchema#string">In modern SEM and focused ion beam microscopes working distance is displayed in the user interface as a calibrated value based on the final lens excitation. For practical reasons it commonly refers to the lower end of the column instead of the lens as this gives the user an indication how much space there is between the column and the sample surface when the latter is in focus. In general, a short working distance improves resolution and signal collection for in-column detectors.</core:scopeNote>
  <core:scopeNote rdf:datatype="http://www.w3.org/2001/XMLSchema#string">The term is frequently used in scanning electron microscopy &amp; scanning ion microscopy.</core:scopeNote>
  <core:scopeNote rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Typically, the unit used for expressing the working distance is millimetre.</core:scopeNote>
  <core:scopeNote rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Working distance is a property of the optical system and as such independent of the position of the specimen. During regular operation, e.g. of SEM &amp; STEM, the here mentioned point of focus will  be in direct vicinity of the specimen surface.</core:scopeNote>
  <rdfs:label rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Working Distance</rdfs:label>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-5149-603X</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-6368-2067</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0003-0575-2853</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0003-0930-082X</term:contributor>
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  <obo:IAO_0000119 rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://www.globalsino.com/EM/page4586.html</obo:IAO_0000119>
  <obo:IAO_0000115 rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Distance which is determined along the optical axis within the column from (1) the lower end of the final optical element between the source and the specimen stage; to (2) the point where the beam is focused.</obo:IAO_0000115>
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</owl:Class>

<owl:Class rdf:about="https://purls.helmholtz-metadaten.de/emg/EMG_00000012">
  <rdfs:subClassOf rdf:resource="http://www.w3.org/2002/07/owl#Thing"/>
  <core:scopeNote rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Due to the wave-particle dualism, a beam of sub-atomic particles (e.g. electrons) can be diffracted.</core:scopeNote>
  <core:scopeNote rdf:datatype="http://www.w3.org/2001/XMLSchema#string">The term "matter" used in this definition is meant to represent crystalline as well as amorphous matter (e.g. gases or objects). Diffraction might be regarded as a specific type of elastic scattering. Diffracted waves are coherent and can interfere, forming diffraction patterns.</core:scopeNote>
  <core:scopeNote rdf:datatype="http://www.w3.org/2001/XMLSchema#string">The terms scattering and diffraction are used to describe the same phenomenon from different perspectives. From the view of a particle, people tend to speak of scattering, while from the view of waves and the related patterns, people speak of diffraction.</core:scopeNote>
  <rdfs:label rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Diffraction</rdfs:label>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0001-6534-4195</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-3054-8734</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-5149-603X</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-6368-2067</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-7086-1901</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-7117-5196</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0003-0575-2853</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0003-1965-7996</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0003-2285-9329</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0009-0008-6410-7217</term:contributor>
  <obo:IAO_0000119 rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://doi.org/10.1016/j.jqsrt.2018.02.002</obo:IAO_0000119>
  <obo:IAO_0000119 rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://doi.org/10.1351/goldbook.D01711</obo:IAO_0000119>
  <obo:IAO_0000119 rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://en.wikipedia.org/wiki/diffraction</obo:IAO_0000119>
  <oboI:hasBroadSynonym rdf:datatype="http://www.w3.org/2001/XMLSchema#string">scattering</oboI:hasBroadSynonym>
  <obo:IAO_0000115 rdf:datatype="http://www.w3.org/2001/XMLSchema#string">A physical phenomenon during which the direction and intensity of a propagating wave is changed due to interaction with matter having structure dimensions in the order of the wavelength.</obo:IAO_0000115>
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</owl:Class>

<owl:Class rdf:about="https://purls.helmholtz-metadaten.de/emg/EMG_00000005">
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  <rdfs:subClassOf rdf:resource="http://www.w3.org/2002/07/owl#Thing"/>
  <core:scopeNote rdf:datatype="http://www.w3.org/2001/XMLSchema#string">In an electron microscope particles are originally emitted by a particle source and intended to interact with a sample or a detector. The definition here should be differentiated from particles moving due to electrochemical gradient (i.e. in diffusion of liquids). Due to the wave-particle duality, a beam can also be considered as a series of waves propagating in a common direction.</core:scopeNote>
  <rdfs:label rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Beam</rdfs:label>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0001-5870-4658</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0001-6534-4195</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0001-8480-4775</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-0070-4337</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-1278-4928</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-1507-9327</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-5149-603X</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-6368-2067</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-7117-5196</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0003-0000-4784</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0003-0575-2853</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0003-0930-082X</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0003-2534-0063</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0003-4745-9735</term:contributor>
  <obo:IAO_0000119 rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://en.wikipedia.org/wiki/Charged_particle_beam</obo:IAO_0000119>
  <oboI:hasRelatedSynonym rdf:datatype="http://www.w3.org/2001/XMLSchema#string">charged particle beam</oboI:hasRelatedSynonym>
  <obo:IAO_0000115 rdf:datatype="http://www.w3.org/2001/XMLSchema#string">A group of particles which move, on average, in a common direction.</obo:IAO_0000115>
</owl:Class>
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<owl:Class rdf:about="https://purls.helmholtz-metadaten.de/emg/EMG_00000048">
  <rdfs:subClassOf rdf:resource="http://www.w3.org/2002/07/owl#Thing"/>
  <rdfs:label rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Time Period</rdfs:label>
  <oboI:hasExactSynonym rdf:datatype="http://www.w3.org/2001/XMLSchema#string">epoch</oboI:hasExactSynonym>
  <oboI:hasExactSynonym rdf:datatype="http://www.w3.org/2001/XMLSchema#string">period</oboI:hasExactSynonym>
  <obo:IAO_0000115 rdf:datatype="http://www.w3.org/2001/XMLSchema#string">An interval of time.</obo:IAO_0000115>
</owl:Class>

<owl:Class rdf:about="https://purls.helmholtz-metadaten.de/emg/EMG_00000002">
  <rdfs:subClassOf rdf:resource="https://purls.helmholtz-metadaten.de/emg/EMG_00000043"/>
  <core:scopeNote rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Here we decided to differentiate backscattering and forwardscattering purely based on angle of the particle trajectory relative to the incident beam. We are aware that, in some instances, particles that fall under the here established definitions for backscattering as well as forwardscattering, might be referred as backscattered.</core:scopeNote>
  <rdfs:label rdf:datatype="http://www.w3.org/2001/XMLSchema#string">TEM Backscattering</rdfs:label>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0001-6534-4195</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-1278-4928</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-5149-603X</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-6368-2067</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-7086-1901</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-7117-5196</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0003-1965-7996</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0009-0008-6410-7217</term:contributor>
  <obo:IAO_0000119 rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Ludwig Reimer, Scanning Electron Microscopy - Physics of Image Formation and Microanalysis (ISBN 978-3-642-08372-3) - pages 57ff</obo:IAO_0000119>
  <obo:IAO_0000115 rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Scattering which results in scattered electrons with an absolute scattering angle larger than 90 degrees.</obo:IAO_0000115>
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</owl:Class>

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<owl:Class rdf:about="https://purls.helmholtz-metadaten.de/emg/EMG_00000030">
  <rdfs:subClassOf rdf:resource="http://www.w3.org/2002/07/owl#Thing"/>
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  <core:scopeNote rdf:datatype="http://www.w3.org/2001/XMLSchema#string">The plane is typically on the specimen.</core:scopeNote>
  <rdfs:label rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Focal Plane</rdfs:label>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0001-6534-4195</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-0070-4337</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0003-2285-9329</term:contributor>
  <oboI:hasExactSynonym rdf:datatype="http://www.w3.org/2001/XMLSchema#string">front focal plane</oboI:hasExactSynonym>
  <oboI:hasRelatedSynonym rdf:datatype="http://www.w3.org/2001/XMLSchema#string">specimen plane</oboI:hasRelatedSynonym>
  <obo:IAO_0000115 rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Plane which is perpendicular to the optical axis and includes the focal point.</obo:IAO_0000115>
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  <rdfs:subClassOf rdf:resource="https://purls.helmholtz-metadaten.de/emg/EMG_00000048"/>
  <core:scopeNote rdf:datatype="http://www.w3.org/2001/XMLSchema#string">The physical components relevant to moving time are typically the stage, the specimen, and the retractable detectors.</core:scopeNote>
  <rdfs:label rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Moving Time</rdfs:label>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-9700-4803</term:contributor>
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  <obo:IAO_0000115 rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Time period during which the position or orientation of either the beam  or physical components are changed within a coordinate system of the  microscope. 
</obo:IAO_0000115>
</owl:Class>

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  <rdfs:subClassOf rdf:resource="http://www.w3.org/2002/07/owl#Thing"/>
  <core:scopeNote rdf:datatype="http://www.w3.org/2001/XMLSchema#string">The term "matter" used in this definition is meant to represent crystalline as well as amorphous matter (e.g. gases or objects). Diffraction might be regarded as a specific type of elastic scattering. The terms scattering and diffraction are used to describe the same phenomenon from different perspectives. From the view of a particle, people tend to speak of scattering, while from the view of waves and the related patterns, people speak of diffraction.</core:scopeNote>
  <rdfs:label rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Scattering</rdfs:label>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0001-6534-4195</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0009-0008-6410-7217</term:contributor>
  <obo:IAO_0000119 rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://doi.org/10.1016/j.jqsrt.2018.02.002</obo:IAO_0000119>
  <obo:IAO_0000115 rdf:datatype="http://www.w3.org/2001/XMLSchema#string">A physical phenomenon during which the trajectory of a particle is changed due to interaction with matter.</obo:IAO_0000115>
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</owl:Class>

<owl:Class rdf:about="https://purls.helmholtz-metadaten.de/emg/EMG_00000041">
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  <rdfs:subClassOf rdf:resource="http://www.w3.org/2002/07/owl#Thing"/>
  <rdfs:label rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Probe Current</rdfs:label>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0003-0000-4784</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0003-0575-2853</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0003-0930-082X</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0003-2285-9329</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0003-2534-0063</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0003-4745-9735</term:contributor>
  <obo:IAO_0000115 rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Electrical current which arrives at the specimen.</obo:IAO_0000115>
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</owl:Class>

<owl:Class rdf:about="https://purls.helmholtz-metadaten.de/emg/EMG_00000036">
  <rdfs:subClassOf rdf:resource="https://purls.helmholtz-metadaten.de/emg/EMG_00000043"/>
  <core:scopeNote rdf:datatype="http://www.w3.org/2001/XMLSchema#string">The change in energy mentioned in the definition depends on the measurable energy loss within an electron microscope. A physical definition of inelastic scattering is, when the state of the system (probe and target) changes.</core:scopeNote>
  <rdfs:label rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Inelastic Scattering</rdfs:label>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0001-6534-4195</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-1278-4928</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-5149-603X</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-6368-2067</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-7086-1901</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-7117-5196</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0003-1965-7996</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0009-0008-6410-7217</term:contributor>
  <obo:IAO_0000115 rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Scattering during which the particle that is scattered changes its energy.</obo:IAO_0000115>
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</owl:Class>

<owl:Class rdf:about="https://purls.helmholtz-metadaten.de/emg/EMG_00000017">
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  <rdfs:subClassOf rdf:resource="http://www.w3.org/2002/07/owl#Thing"/>
  <core:scopeNote rdf:datatype="http://www.w3.org/2001/XMLSchema#string">To achieve experimental reproducibility this workflow should be described in detail.</core:scopeNote>
  <rdfs:label rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Dynamic Refocusing</rdfs:label>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0001-6534-4195</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-0070-4337</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-1278-4928</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-5149-603X</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-6368-2067</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-7117-5196</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0003-0575-2853</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0003-2285-9329</term:contributor>
  <obo:IAO_0000115 rdf:datatype="http://www.w3.org/2001/XMLSchema#string">A workflow to keep the specimen in focus by automatic means.</obo:IAO_0000115>
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</owl:Class>

<owl:Class rdf:about="https://purls.helmholtz-metadaten.de/emg/EMG_00000062">
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  <rdfs:subClassOf rdf:resource="http://www.w3.org/2002/07/owl#Thing"/>
  <core:scopeNote rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Due to the anisotropy of the source point, Kikuchi lines typically appear as a pair of excess and defect lines.</core:scopeNote>
  <core:scopeNote rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Kikuchi lines are in fact no lines but Kossel-cone cuts. More precisely they are intersections of two opposite (Kossel) cones with the detector plane. Usually the opening angle of the cones is nearly 90 deg, therefore only at low (SEM) voltages the hyperbolic character becomes recognizable, hence the term Kikuchi lines.</core:scopeNote>
  <core:scopeNote rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Kikuchi lines can can be attributed to a specific set of lattice planes.</core:scopeNote>
  <core:scopeNote rdf:datatype="http://www.w3.org/2001/XMLSchema#string">We note that the current definition is made for plane detectors and might need to be adjusted should non-planar detectors be used.</core:scopeNote>
  <rdfs:label rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Kikuchi Lines</rdfs:label>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0001-6534-4195</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-1278-4928</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-5149-603X</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-6368-2067</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-7117-5196</term:contributor>
  <obo:IAO_0000119 rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://www.iso.org/obp/ui/en/#iso:std:iso:22493:ed-2:v1:en (section 6.5.1)</obo:IAO_0000119>
  <obo:IAO_0000119 rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://www.jeol.com/words/emterms/20121023.015559.php</obo:IAO_0000119>
  <obo:IAO_0000115 rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Patterns of electron intensity which are (1) formed by electron diffraction, (2) appear as a geometrical  feature in a Kikuchi pattern as a pair of lines limiting Kikuchi bands.
</obo:IAO_0000115>
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</owl:Class>

<owl:Class rdf:about="https://purls.helmholtz-metadaten.de/emg/EMG_00000065">
  <rdfs:subClassOf rdf:resource="http://www.w3.org/2002/07/owl#Thing"/>
  <core:scopeNote rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Bragg's Law is a condition for constructive interference of diffracted radiation.</core:scopeNote>
  <core:scopeNote rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Bragg's law is commonly used in TEM to calculate the lattice spacing of a crystal from a diffraction pattern, most commonly zone axis or ring diffraction patterns.</core:scopeNote>
  <core:scopeNote rdf:datatype="http://www.w3.org/2001/XMLSchema#string">We define the use of Bragg's Law for extracting information about lattice plane spacing as \"may allow to\" because in addition to Bragg's law also other conditions need to be satisfied. For example the structure factor must be non-zero.</core:scopeNote>
  <core:scopeNote rdf:datatype="http://www.w3.org/2001/XMLSchema#string">While Bragg's Law applies to real space (or direct space), Laue condition is its equivalent in reciprocal space (or k-space).</core:scopeNote>
  <rdfs:label rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Bragg's Law</rdfs:label>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0001-6534-4195</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-1278-4928</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-5149-603X</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-6368-2067</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-7086-1901</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0009-0008-6410-7217</term:contributor>
  <obo:IAO_0000115 rdf:datatype="http://www.w3.org/2001/XMLSchema#string">A condition which (1) is defined as twice the lattice spacing in a large crystal multiplied with the sine of the Bragg angle between the incident beam and a set of lattice planes, being a whole multiple of the radiation wavelength, and (2) if satisfied, may allow to relate the location of a scattering intensity maximum within a diffraction pattern to the corresponding lattice plane spacing.</obo:IAO_0000115>
  <rdfs:seeAlso rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://physicsopenlab.org/2018/01/18/bragg-diffraction/</rdfs:seeAlso>
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</owl:Class>

<owl:Class rdf:about="https://purls.helmholtz-metadaten.de/emg/EMG_00000024">
  <rdfs:subClassOf rdf:resource="http://www.w3.org/2002/07/owl#Thing"/>
  <core:scopeNote rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Often electron probe is used to describe a point where the beam is focused. It is commonly used in connection with focused beams.</core:scopeNote>
  <rdfs:label rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Electron Probe</rdfs:label>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0001-8480-4775</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-0070-4337</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-1278-4928</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-1507-9327</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-5149-603X</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-6368-2067</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-7117-5196</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0003-0000-4784</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0003-0575-2853</term:contributor>
  <oboI:hasRelatedSynonym rdf:datatype="http://www.w3.org/2001/XMLSchema#string">probe</oboI:hasRelatedSynonym>
  <obo:IAO_0000115 rdf:datatype="http://www.w3.org/2001/XMLSchema#string">The part of the beam which interacts with the sample.</obo:IAO_0000115>
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</owl:Class>

<owl:Class rdf:about="https://purls.helmholtz-metadaten.de/emg/EMG_00000033">
  <rdfs:subClassOf rdf:resource="https://purls.helmholtz-metadaten.de/emg/EMG_00000048"/>
  <core:scopeNote rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Frame flyback time may be considered a specific instance of wait time, however some instruments might still be able to acquire data during frame flyback time which is why it is defined separately in this artefact.</core:scopeNote>
  <rdfs:label rdf:datatype="http://www.w3.org/2001/XMLSchema#string">Frame Flyback Time</rdfs:label>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0001-5870-4658</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0001-6534-4195</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0001-8480-4775</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-0070-4337</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-1008-4530</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-1278-4928</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-1418-0984</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-1507-9327</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-2818-5890</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-5149-603X</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-6004-2304</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-6368-2067</term:contributor>
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  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-7086-1901</term:contributor>
  <term:contributor rdf:datatype="http://www.w3.org/2001/XMLSchema#string">https://orcid.org/0000-0002-7117-5196</term:contributor>